Nanogaps Sensors and Resonators (NanoSAR)

Título del proyecto: NanoSAR – Nanogaps Sensors and Resonators
Entidad financiadora: Acción Integrada 2009 España-Francia, Ministerio de Ciencia e Innovación
Ref. FR2009-0075
Entidades participantes: Grupo de Aplicaciones de Microondas (Universidad Politécnica de Valencia), Instituto de Investigación en Comunicaciones Ópticas y Microondas (Universidad de Limoges),
Duració: 01/01/2010 – 01/01/2012
Investigador responsable: Dr. Jorge D. Martínez Pérez y Dr. Vicente E. Boria Esbert
Número de investigadores participantes: 3 (Subproyecto Grupo de Aplicaciones de Microondas), 6 (Proyecto)

Abstract: The main goal of this project was the study of high quality factor resonators based in MEMs/NEMs type structures, and its application to the fabrication of passive resonant sensors that could be remotely interrogated. In the same way, this integrated action made possible to maintain and strengthen the existing collaboration between the French and Spanish groups in the field of MEMs/NEMs and its potential applications, having contributed to the training of researchers and technical staff in their pre-doctoral phase. The know-how gained through the implementation of this project has been key point to continue the development of a R & D line in micro-and nano-technologies applied to telecommunications.

The main activities undertaken during the project were as follows: a) electromechanical behavior modeling of MEMS / NEMS structures by static, dynamic and nonlinear analysis, b) EM simulations using commercial finite element software that combine 3D structures with models or equivalent circuits of the resonators (electromechanical model developed), c) optimizing process of the structures to design new structures with an intermodulation distortion level that ensures to determine the resonant frequency of the structure from the power signals reflected by the internal antenna, d) development of microfabrication technologies that allow the fabrication of resonant micro / nano-structures, e) analysis of the integration of resonant structures with antennas that allow the realization of passive sensors that can be interrogated remotely .